
Researchers from the University of Illinois at Urbana-Champaign have
developed a one-step, facile method to pattern graphene by using stencil
mask and oxygen plasma reactive-ion etching, and subsequent
polymer-free direct transfer to
flexible substrates.
Graphene, a two-dimensional carbon allotrope, has received immense
scientific and technological interest. Combining exceptional mechanical
properties, superior carrier mobility, high thermal conductivity,
hydrophobicity, and potentially low manufacturing cost, graphene
provides a superior base material for next generation bioelectrical,
electromechanical, optoelectronic, and thermal management applications.
"Significant progress has been made in the direct synthesis of
large-area, uniform, high quality graphene films using chemical vapor
deposition (CVD) with various precursors and catalyst substrates,"
explained SungWoo Nam, an assistant professor of mechanical science and
engineering at Illinois. "However, to date, the infrastructure
requirements on post-synthesis processing--patterning and transfer--for
creating interconnects, transistor channels, or device terminals have
slowed the implementation of graphene in a wider range of applications."
"In conjunction with the recent evolution of additive and subtractive
manufacturing techniques such as 3D printing and computer numerical
control milling, we developed a simple and scalable graphene patterning
technique using a stencil mask fabricated via a laser cutter," stated
Keong Yong, a graduate student and first author of the paper, "Rapid
Stencil Mask Fabrication Enabled One-Step Polymer-Free Graphene
Patterning and Direct Transfer for Flexible Graphene Devices appearing
in Scientific Reports.
"Our approach to patterning graphene is based on a shadow mask technique
that has been employed for contact metal deposition," Yong added. "Not
only are these stencil masks easily and rapidly manufactured for
iterative rapid prototyping, they are also reusable, enabling
cost-effective pattern replication. And since our approach involves
neither a polymeric transfer layer nor organic solvents, we are able to
obtain contamination-free graphene patterns directly on various flexible
substrates."

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